Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow‐Power Metal Oxide Semiconductor‐Based Gas Sensors (Small 48/2022)
Source abstract
Abstract
Suspended 1D Nanoheaters In article number 2204078, Heungjoo Shin and co-workers report a suspended 1D nanoheater capable of ultrarapid heating at an ultralow power. The nanoheater is implemented as a gas sensor by the regioselective growth of metal oxide nanomaterials, enabling reliable and sensitive gas detection. This sophisticated nanodevice can be manufactured using batch microfabrication technology exclusively, offering promising pathways for applications in various electrothermal devices.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Gas Sensing Nanomaterials and Sensors
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Affiliations
Department of Mechanical Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan 44919 Republic of Korea
Department of Electrical Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan 44919 Republic of Korea
Department of Materials Science and Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan 44919 Republic of Korea
School of Advanced Materials Science and Engineering Sungkyunkwan University (SKKU) Suwon 16419 Republic of Korea
References
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