Nanowire Mechanical Switch with a Built‐In Diode

A nanoelectromechanical switch consists of two landing electrodes on either side of a movable silicon nanowire, separated by a nanoscale air gap. The bistable mechanical state of the nanowire determines an on/off state, which is sensed by measuring the contact resistance. The n-type semiconductor electrodes and p-type nanowire form a p–n junction diode at the cross-point. Detailed facts of importance to specialist readers are published as ”Supporting Information”. Such documents are peer-reviewed, but not copy-edited or typeset. They are made available as submitted by the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.