journal article·2018-02-27

Realizing Large-Scale, Electronic-Grade Two-Dimensional Semiconductors

Yu-Chuan Lin, Bhakti Jariwala, Brian M. Bersch, Ke Xu, Yifan Nie, Baoming Wang, Sarah M. Eichfeld, Xiaotian Zhang, Tanushree H. Choudhury, Yi Pan, Rafik Addou, Christopher M. Smyth, Jun Li, Kehao Zhang, M. Aman Haque, Stefan Fölsch, Randall M. Feenstra, Robert M. Wallace, Kyeongjae Cho, Susan K. Fullerton-Shirey, Joan M. Redwing, Joshua A. Robinson

ACS Nano· Volume 12· Issue 2
Publisher page

Abstract

Atomically thin transition metal dichalcogenides (TMDs) are of interest for next-generation electronics and optoelectronics. Here, we demonstrate device-ready synthetic tungsten diselenide (WSe 2 ) via metal–organic chemical vapor deposition and provide key insights into the phenomena that control the properties of large-area, epitaxial TMDs. When epitaxy is achieved, the sapphire surface reconstructs, leading to strong 2D/3D ( i.e., TMD/substrate) interactions that impact carrier transport. Furthermore, we demonstrate that substrate step edges are a major source of carrier doping and scattering. Even with 2D/3D coupling, transistors utilizing transfer-free epitaxial WSe 2 /sapphire exhibit ambipolar behavior with excellent on/off ratios (∼10 7 ), high current density (1–10 μA·μm –1 ), and good field-effect transistor mobility (∼30 cm 2 ·V –1 ·s –1 ) at room temperature. This work establishes that realization of electronic-grade epitaxial TMDs must consider the impact of the TMD precursors, substrate, and the 2D/3D interface as leading factors in electronic performance.
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Research context

OpenAlex topics: 2D Materials and Applications · ZnO doping and properties · Nanowire Synthesis and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Materials Science and Engineering, Materials Research Institute, and Center for 2D and Layered Materials (2DLM), The Pennsylvania State University, University Park, Pennsylvania 16802, United States

Department of Chemical and Petroleum Engineering, University of Pittsburgh, Pittsburgh, Pennsylvania 15213, United States

Department of Materials Science and Engineering, The University of Texas at Dallas, Richardson, Texas 75080, United States

Department of Mechanical Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States

Two-Dimensional Crystal Consortium (2DCC), The Pennsylvania State University, University Park, Pennsylvania 16802, United States

Paul-Drude-Institut für Festkörperelektronik, Hausvogteiplatz 5-7, Berlin 10117, Germany

Department of Physics, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213, United States

Department of Electrical and Computer Engineering, University of Pittsburgh, Pittsburgh, Pennsylvania 15213, United States

Funding

Defense Advanced Research Projects Agency · Division of Industrial Innovation and Partnerships · National Institute of Standards and Technology · Microelectronics Advanced Research Corporation · Semiconductor Research Corporation · Division of Electrical, Communications and Cyber Systems · Division of Materials Research

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