Electroplate and Lift Lithography for Patterned Micro/Nanowires Using Ultrananocrystalline Diamond (UNCD) as a Reusable Template
Abstract
Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Force Microscopy Techniques and Applications · Diamond and Carbon-based Materials Research
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Affiliations
Department of Chemistry, University of Wisconsin−Stevens Point, Stevens Point, Wisconsin 54481, United States
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439, United States
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, United States
Department of Chemistry and Engineering Physics and Nanotechnology Center for Collaborative R&D [NCCRD], University of Wisconsin−Platteville, Platteville, Wisconsin 53818, United States
Funding
U.S. Department of Energy