journal article·2023-01-27

Efficient and Fast All-Optical Modulator with In Situ Grown MoTe2 Nanosheets on Silicon

Hongyuan Cao, Haitao Chen, Yu Pan, Mingfei Ding, Bingcheng Pan, Weike Zhao, Huan Li, Zejie Yu, Yu Ye, Daoxin Dai

ACS Applied Nano Materials· Volume 6· Issue 2
Publisher page

Abstract

All-optical modulators play a key role in building all-optical networks for efficient optical signal processing and have attracted intensive attention. In this paper, all-optical modulators with in situ grown molybdenum telluride (MoTe 2 ) nanosheets on silicon are proposed and demonstrated for the first time with a self-developed complementary-metal-oxide-semiconductor (CMOS)-compatible fabrication processes. For the silicon-based all-optical modulators with a MoTe 2 -integrated microring resonator and microdisk resonator, the modulation is as efficient as 17.76 and 158.48 pm/mW while the rise/fall time is 3.7/3.6 and 1.5/3.3 μs, respectively. This is the highest tuning efficiency and the fastest response speed among all-optical silicon modulators based on the photothermal effect of two-dimensional materials under the out-of-plane pumping configuration. Furthermore, the manufacturing processes of the present devices are developed from in situ grown MoTe 2 nanosheets on a silicon-on-insulator platform, which is CMOS-compatible, stable, and suitable for large-scale photonic integration.
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Research context

OpenAlex topics: Photonic and Optical Devices · Advanced Fiber Laser Technologies · Neural Networks and Reservoir Computing

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, 310058Hangzhou, China

College of Advanced Interdisciplinary Studies &Hunan Provincial Key Laboratory of Novel Nano-Optoelectronic Information Materials and Devices, National University of Defense Technology, Changsha410073, Hunan, China

State Key Laboratory for Artificial Microstructure &Mesoscopic Physics, School of Physics, Peking University, Beijing100871, China

Funding

Ministry of Science and Technology of the People's Republic of China · China Postdoctoral Science Foundation · Central University Basic Research Fund of China · National Natural Science Foundation of China · Natural Science Foundation of Zhejiang Province · Zhejiang Provincial Major Research and Development Program

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