Control and characterization of structural and optical properties of ZnO thin films fabricated by thermal oxidation Zn metallic films

Abstract The physical properties of ZnO thin films fabricated by controlling thermal oxidation zinc metallic films process have been investigated. Comparative characterization of crystallographical, optical or spectroscopic properties of the samples was performed. The as-oxidized sample by rapid thermal process showed level of crystallinity degraded, higher optical transmittance in the visible and near-infrared region, and lower intensity of the near band edge emission compared to those prepared by conventional thermal oxidation. The overall results suggested that with in-depth understanding of the oxidation mechanism, rapid oxidation process could be employed as an approach to fabricate amorphous transparent oxide thin films from low-melting-point metals, which might have potential advantages in microelectronic and optoelectronic applications.