Silicon carbide film-based Fabry-Pérot cavity resonance-enhanced absorption and its application for color filters

Abstract We present silicon carbide (SiC)-based Fabry-Perot (F–P) cavities which exhibit highly selective light absorption due to the strong thin film interference effect. Different configurations were discussed here by theoretically exploring the optical response of SiC film on eight metal substrates. Among them, SiC on Al, SiC on Ti and SiC on Pd F–P cavity resonators have the capacity of spectral tunability covering visible light regime, near-perfect absorption and angle dependence resistance. However, SiC on Al substrate architecture, is expected to be the optimal choice in commercial applications, harsh environment and extreme weather. The thickness-dependent properties of SiC-based resonator, in which small thickness variation will result in apparent spectra shift, was also demonstrated. Transfer-Matrix(T-M) method is introduced for calculation. Theoretical results of total round trip phase delay are in very good accordance with the simulations. We believe the SiC-based cavities have a promising application in a variety of research areas such as color filters, photovoltaic devices, no-ink printing and provide an easier way for fabrication.