journal article·2024-04-26

Density Functional Theory Study of Polarization-Induced Electron Confinement by Dilute Boron Alloying in ε-Ga2O3 Nanometer-Thick Film for High Electron Mobility Transistor

Yan Wang, Jiahe Cao, Yimin Liao, Chuang Zhang, Zhigao Xie, Hanzhao Song, Jierui Xue, Andeng Qu, Yew Hoong Wong, Zengxia Mei, Chee Keong Tan

ACS Applied Nano Materials· Volume 7· Issue 8
Publisher page

Abstract

Density functional theory computations were utilized to quantify the polarization discontinuity of 1.8 μC/cm 2 in ε-(B 0.0625 Ga 0.9375 ) 2 O 3 /ε-Ga 2 O 3 heterostructure. The polarization effect was sufficient to generate a two-dimensional electron gas (2DEG) at the heterostructure interface without doping. The creation of 2DEG occurred when the BGaO layer thickness exceeded 17 nm, with its density exhibiting a logarithmic increase as the thickness was augmented. However, the trend plateaued when the thickness surpassed 80 nm with a carrier density of 8.17 × 10 12 cm –2 . Moreover, guided by Griffith’s theory and enthalpy calculations, the epitaxial layer could potentially be pseudomorphically grown up to 968 nm under growth conditions of 1000 K with dilute boron alloying. This design heralds the potential for creating a high electron mobility transistor based on ε-BGaO with an epitaxial layer just nanometers thick, well-suited for high-power and radio frequency applications.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Ga2O3 and related materials · ZnO doping and properties · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Advanced Materials Thrust, Function Hub, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou 511453, Guangdong, China

Centre of Advanced Materials, Department of Mechanical Engineering, Faculty of Engineering, University of Malaya, Kuala Lumpur 50603, Malaysia

Songshan Lake Materials Laboratory, Dongguan 523808, Guangdong, China

Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China

Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Kowloon 999077, Hong Kong, China

Guangzhou Municipal Key Laboratory of Materials Informatics, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou 511453, Guangdong, China

Guangzhou Municipal Key Laboratory of Integrated Circuits Design, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou 511453, Guangdong, China

Funding

State Administration of Foreign Experts Affairs · Songshan Lake Materials Laboratory · Guangzhou Municipal Science and Technology Project · Hong Kong University of Science and Technology

References (46)

Show source-provided references
1. 10.1038/s41467-023-40938-y10.1038/s41467-023-40938-y ↗
2. 10.1063/5.008903810.1063/5.0089038 ↗
3. 10.1002/aelm.20210074110.1002/aelm.202100741 ↗
4. 10.1038/s41928-021-00640-710.1038/s41928-021-00640-7 ↗
5. 10.1039/C9TC04912F10.1039/C9TC04912F ↗
6. 10.1109/JPHOT.2017.273162510.1109/JPHOT.2017.2731625 ↗
7. 10.1063/1.514219610.1063/1.5142196 ↗
8. 10.1002/aelm.20220121610.1002/aelm.202201216 ↗
9. 10.1063/1.501931010.1063/1.5019310 ↗
10. 10.1063/5.016152110.1063/5.0161521 ↗
11. 10.1103/PhysRevApplied.13.02405110.1103/PhysRevApplied.13.024051 ↗
12. 10.1063/5.014582610.1063/5.0145826 ↗
13. 10.1063/5.013893910.1063/5.0138939 ↗
14. 10.35848/1882-0786/ab916810.35848/1882-0786/ab9168 ↗
15. 10.1063/1.501972110.1063/1.5019721 ↗
16. 10.1063/5.017216110.1063/5.0172161 ↗
17. 10.1007/s11433-022-1907-910.1007/s11433-022-1907-9 ↗
18. 10.1109/led.2020.299544610.1109/led.2020.2995446 ↗
19. 10.1021/acsaelm.0c0094710.1021/acsaelm.0c00947 ↗
20. 10.1016/j.actamat.2017.08.06210.1016/j.actamat.2017.08.062 ↗
21. 10.1080/21663831.2018.144397810.1080/21663831.2018.1443978 ↗
22. 10.1038/s41598-019-41286-y10.1038/s41598-019-41286-y ↗
23. 10.1038/s41598-017-15302-y10.1038/s41598-017-15302-y ↗
24. 10.1002/pssr.20230022410.1002/pssr.202300224 ↗
25. 10.1063/5.014274610.1063/5.0142746 ↗
26. 10.1063/1.512867510.1063/1.5128675 ↗
27. 10.1063/1.509319510.1063/1.5093195 ↗
28. 10.1088/1361-6641/ab607c10.1088/1361-6641/ab607c ↗
29. 10.1063/5.000580810.1063/5.0005808 ↗
30. 10.1116/6.000190710.1116/6.0001907 ↗
31. 10.1109/LED.2022.323308010.1109/LED.2022.3233080 ↗
32. 10.1063/1.164491010.1063/1.1644910 ↗
33. MedeA-VASP. MedeA-VASP; Material Designs Inc. www.materialsdesign.com/medea/medea-vasp.
34. 10.1103/PhysRevB.50.1795310.1103/PhysRevB.50.17953 ↗
35. 10.1103/PhysRevLett.77.386510.1103/PhysRevLett.77.3865 ↗
36. 10.1098/rspa.1984.002310.1098/rspa.1984.0023 ↗
37. 10.1524/zkri.2011.132110.1524/zkri.2011.1321 ↗
38. VTSTtools https://theory.cm.utexas.edu/vtsttools/.
39. 10.1016/j.jssc.2012.05.01010.1016/j.jssc.2012.05.010 ↗
40. 10.7567/APEX.11.06110110.7567/APEX.11.061101 ↗
41. Grundmann, M. see http://my.ece.ucsb.edu/mgrundmann/bandeng/forinformationonBandEngSchrodinger-Poissonsolver.
42. 10.1063/1.12694010.1063/1.126940 ↗
43. 10.1103/PhysRevB.51.1056810.1103/PhysRevB.51.10568 ↗
44. 10.1039/D3TC03010E10.1039/D3TC03010E ↗
45. 10.1063/1.492185510.1063/1.4921855 ↗
46. 10.1063/5.001991510.1063/5.0019915 ↗