SPECIAL IMPREGNATED ACTIVATED CARBON AND CANISTER FOR REMOVING AsH_3 AND PH_3 IN H_2 STREAM
Source abstract
Abstract
Special four component impregnated activated carbon as well as the semiconductor canisters packed with it has been developed to clean the exhaust H 2 stream containing AsH 3 and PH 3 in the metal organic compound vapor deposit (MOCVD) or metal organic vapor phase extent (MOVPE) processes in semiconductor field. Its lifetime is 2 or 3 times longer than that of the sorbent packed in the Drager B3P3 canisters, which are used as the necessary canisters to remove AsH 3 and PH 3 in the MOCVD equipment of VP50 RP made in Sweden in 1988.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Gas Sensing Nanomaterials and Sensors · Heat Transfer and Boiling Studies · Heat Transfer and Optimization
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