journal article·2026-07-08

Wafer-scale growth of highly stable p-type semiconducting monolayer MoSi2N4 single crystals

Su Sun, Chuan Xu, Keqiang Ji, Yuexing Xia, Bo Tong, Jinmeng Tong, Chen Chen, Wenqin Zhao, Duanliang Zhou, Qinghe Wang, Lixin Yang, Qiang Wang, Miaomiao Li, Biyuan Zheng, Lai-Peng Ma, Xinfeng Liu, Zhibo Liu, Mengjian Zhu, Kaihui Liu, Peng Liu, Kaili Jiang, Hui-Ming Cheng, Wencai Ren

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Abstract

Single-crystal wafers of p-type two-dimensional (2D) semiconductors are highly desired for next-generation electronics. However, p-type 2D semiconductors remain scarce, and achieving wafer-scale monolayer single crystals of such materials is even more challenging. Here we report the wafer-scale growth of p-type semiconducting monolayer MoSi2N4 single crystals on Cu (111) foils with prestored Mo and Si atoms. The <110> steps on Cu (111) guide the nucleation and unidirectional orientation of monolayer MoSi2N4 domains, enabling their seamless stitching into a continuous single-crystal film. The resulting MoSi2N4 exhibits exceptional quality, with an intrinsic mobility of 154 cm2 V-1 s-1. Field-effect transistor arrays fabricated from this material deliver excellent electrical performance, including an on/off ratio of ~3.8 ± 1.4 × 106 and an on-state current density up to ~17.96 μA μm-1 (1 μm channel length), along with superior stability compared with monolayer WSe2-based counterparts. Furthermore, this versatile growth strategy also enables the fabrication of wafer-scale monolayer WSi2N4 single crystals. This work establishes a promising p-type 2D semiconductor platform for future integrated circuits.
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Research context

OpenAlex topics: 2D Materials and Applications · MXene and MAX Phase Materials · Nanowire Synthesis and Applications

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