Dopant mapping for the nanotechnology age
Source abstract
Abstract
The push for smaller microelectronics poses many challenges, such as locating dopant atoms in semiconductors with ever-increasing precision. The ideal technique must be able to detect single dopants with atomic resolution, and identify their electronic state. Neither is an easy task.
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Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices · Advanced Electron Microscopy Techniques and Applications
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