journal article·2010-01

A silicon-based electrical source of surface plasmon polaritons

R. J. Walters, R. V. A. van Loon, I. Brunets, J. Schmitz, A. Polman

Nature Materials· Volume 9· Issue 1
Publisher page

Abstract

After decades of process scaling driven by Moore's law, the silicon microelectronics world is now defined by length scales that are many times smaller than the dimensions of typical micro-optical components. This size mismatch poses an important challenge for those working to integrate photonics with complementary metal oxide semiconductor (CMOS) electronics technology. One promising solution is to fabricate optical systems at metal/dielectric interfaces, where electromagnetic modes called surface plasmon polaritons (SPPs) offer unique opportunities to confine and control light at length scales below 100 nm (refs 1, 2). Research groups working in the rapidly developing field of plasmonics have now demonstrated many passive components that suggest the potential of SPPs for applications in sensing and optical communication. Recently, active plasmonic devices based on III-V materials and organic materials have been reported. An electrical source of SPPs was recently demonstrated using organic semiconductors by Koller and colleagues. Here we show that a silicon-based electrical source for SPPs can be fabricated using established low-temperature microtechnology processes that are compatible with back-end CMOS technology.
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Research context

OpenAlex topics: Plasmonic and Surface Plasmon Research · Photonic and Optical Devices · Gold and Silver Nanoparticles Synthesis and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (30)

Show source-provided references
1. Raether, H. Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer Tracts in Modern Physics, Vol. 111, Springer, 1988).10.1007/BFb0048317 ↗
2. Barnes, W. L., Dereux, A. & Ebbesen, T. W. Surface plasmon subwavelength optics. Nature 424, 824–830 (2003).10.1038/nature01937 ↗
3. Bozhevolnyi, S. I., Volkov, V. S., Devaux, E., Laluet, J.-Y. & Ebbesen, T. W. Channel plasmon subwavelength waveguide components including interferometers and ring resonators. Nature 440, 508–511 (2006).10.1038/nature04594 ↗
4. Ebbesen, T. W., Genet, C. & Bozhevolnyi, S. I. Surface-plasmon circuitry. Phys. Today 61, 44–50 (2008).10.1063/1.2930735 ↗
5. Homola, J. (ed.) in Surface Plasmon Resonance Based Sensors (Springer Series on Chemical Sensors and Biosensors, Vol. 4, Springer, 2006).10.1007/b100321 ↗
6. Ozbay, E. Plasmonics: Merging photonics and electronics at nanoscale dimensions. Science 311, 189–193 (2006).10.1126/science.1114849 ↗
7. Neutens, P., van Dorpe, P., De Vlaminck, I., Lagae, L. & Borghs, G. Electrical detection of confined gap plasmons in metal–insulator–metal waveguides. Nature Photon. 3, 283–286 (2009).10.1038/nphoton.2009.47 ↗
8. Hill, M. T. et al. Lasing in metallic-coated nanocavities. Nature Photon. 1, 589–594 (2007).10.1038/nphoton.2007.171 ↗
9. Hill, M. T. et al. Lasing in metal–insulator–metal sub-wavelength plasmonic waveguides. Opt. Express 17, 11107–11112 (2009).10.1364/OE.17.011107 ↗
10. Yates, C. J., Samuel, D. W., Burn, P. L., Wedge, S. & Barnes, W. L. Surface plasmon-polariton mediated emission from phosphorescent dendrimer light-emitting diodes. Appl. Phys. Lett. 88, 161105 (2006).10.1063/1.2193795 ↗
11. Koller, D. M. et al. Organic plasmon-emitting diode. Nature Photon. 2, 684–687 (2008).10.1038/nphoton.2008.200 ↗
12. Economou, E. N. Surface plasmons in thin films. Phys. Rev. 182, 539–554 (1969).10.1103/PhysRev.182.539 ↗
13. Verhagen, E., Dionne, J. A., Kuipers, L., Atwater, H. A. & Polman, A. Near-field visualization of strongly confined surface plasmon polaritons in metal–insulator–metal waveguides. Nano Lett. 8, 2925–2929 (2008).10.1021/nl801781g ↗
14. Miyazaki, H. T. & Kurokawa, Y. Squeezing visible light waves into a 3-nm-thick and 55-nm-long plasmon cavity. Phys. Rev. Lett. 97, 097401 (2006).10.1103/PhysRevLett.96.097401 ↗
15. Jun, Y. C., Kekatpure, R. D., White, J. S. & Brongersma, M. L. Nonresonant enhancement of spontaneous emission in metal–dielectric–metal plasmon waveguide structures. Phys. Rev. B 78, 153111 (2008).10.1103/PhysRevB.78.153111 ↗
16. Pavesi, L. & Lockwood, D. J. (eds) in Silicon Photonics (Topics in Applied Physics Series, Vol. 94, Springer, 2004).
17. Schmitz, J. Adding functionality to microchips by wafer post-processing. Nucl. Instrum. Methods 576, 142–149 (2007).10.1016/j.nima.2007.01.142 ↗
18. Brunets, I. et al. Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore) embedded in ALD-alumina for non-volatile memory devices. Surf. Coat. Technol. 201, 9209–9214 (2007).10.1016/j.surfcoat.2007.03.035 ↗
19. Godefroo, S. et al. Classification and control of the origin of photoluminescence from Si nanocrystals. Nature Nanotech. 3, 174–178 (2008).10.1038/nnano.2008.7 ↗
20. Hadjisavvas, G. & Kelires, P. C. Structure and energetics of Si nanocrystals embedded in a-SiO2 . Phys. Rev. Lett. 93, 226104 (2004).10.1103/PhysRevLett.93.226104 ↗
21. Brongersma, M. L., Polman, A., Min, K. S., Tambo, T. & Atwater, H. A. Tuning the emission wavelength of Si nanocrystals in SiO2 by oxidation. Appl. Phys. Lett. 72, 2577–2579 (1998).10.1063/1.121423 ↗
22. Walters, R. J., Kalkman, J., Polman, A., Atwater, H. A. & de Dood, M. J. A. Photoluminescence quantum efficiency of dense silicon nanocrystal ensembles in SiO2 . Phys. Rev. B 73, 132302 (2006).10.1103/PhysRevB.73.132302 ↗
23. Irrera, A. et al. Electroluminescence properties of light emitting devices based on silicon nanocrystals. Physica E 16, 395–399 (2003).10.1016/S1386-9477(02)00609-4 ↗
24. Marconi, A. et al. High power efficiency in Si-nc/SiO2 multilayer light emitting devices by bipolar direct tunnelling. Appl. Phys. Lett. 94, 221110 (2009).10.1063/1.3147164 ↗
25. Sze, S. M. Physics of Semiconductor Devices 2nd edn (Wiley, 1981).
26. Dionne, J. A., Sweatlock, L. A., Atwater, H. A. & Polman, A. Plasmon slot waveguides: Towards chip-scale propagation with subwavelength-scale localization. Phys. Rev. B 73, 035407 (2006).10.1103/PhysRevB.73.035407 ↗
27. Ford, G. W. & Weber, W. H. Electromagnetic interactions of molecules with metal surfaces. Phys. Rep. 113, 195–287 (1984).10.1016/0370-1573(84)90098-X ↗
28. Hryciw, A. C., Jun, Y. C. & Brongersma, M. L. Plasmon-enhanced emission from optically-doped MOS light sources. Opt. Express 17, 185–192 (2008).10.1364/OE.17.000185 ↗
29. Benini, L., Guiducci, C. & Paulus, C. Electronic detection of DNA hybridization: Toward fully-electronic microarrays. IEEE Des. Test Comput. 24, 38–48 (2007).10.1109/MDT.2007.12 ↗
30. Yan, G. et al. An improved TMAH Si-etching solution without attacking exposed aluminium. Sensor Actuat. A 89, 135–141 (2001).10.1016/S0924-4247(00)00546-X ↗