Nanowire active-matrix circuitry for low-voltage macroscale artificial skin
Source abstract
Abstract
Large-scale integration of high-performance electronic components on mechanically flexible substrates may enable new applications in electronics, sensing and energy. Over the past several years, tremendous progress in the printing and transfer of single-crystalline, inorganic micro- and nanostructures on plastic substrates has been achieved through various process schemes. For instance, contact printing of parallel arrays of semiconductor nanowires (NWs) has been explored as a versatile route to enable fabrication of high-performance, bendable transistors and sensors. However, truly macroscale integration of ordered NW circuitry has not yet been demonstrated, with the largest-scale active systems being of the order of 1 cm(2) (refs 11,15). This limitation is in part due to assembly- and processing-related obstacles, although larger-scale integration has been demonstrated for randomly oriented NWs (ref. 16). Driven by this challenge, here we demonstrate macroscale (7×7 cm(2)) integration of parallel NW arrays as the active-matrix backplane of a flexible pressure-sensor array (18×19 pixels). The integrated sensor array effectively functions as an artificial electronic skin, capable of monitoring applied pressure profiles with high spatial resolution. The active-matrix circuitry operates at a low operating voltage of less than 5 V and exhibits superb mechanical robustness and reliability, without performance degradation on bending to small radii of curvature (2.5 mm) for over 2,000 bending cycles. This work presents the largest integration of ordered NW-array active components, and demonstrates a model platform for future integration of nanomaterials for practical applications.
Source: europepmc · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Nanowire Synthesis and Applications · ZnO doping and properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (20)
Show source-provided references
1. Cao, Q. et al. Medium-scale carbon nanotube thin-film integrated circuits on flexible plastic substrates. Nature 454, 495–500 (2008).10.1038/nature07110 ↗
2. Sekitani, T. et al. Organic nonvolatile memory transistors for flexible sensor arrays. Science 326, 1516–1519 (2009).10.1126/science.1179963 ↗
3. Cohen-Karni, T., Timko, B. P., Weiss, L. E. & Lieber, C. M. Flexible electrical recording from cells using nanowire transistor arrays. Proc. Natl Acad. Sci. USA 106, 7309–7313 (2009).10.1073/pnas.0902752106 ↗
4. Fan, Z. et al. Three-dimensional nanopillar-array photovoltaics on low-cost and flexible substrates. Nature Mater. 8, 648–653 (2009).10.1038/nmat2493 ↗
5. McAlpine, M. C., Ahmad, H., Wang, D. & Heath, J. R. Highly ordered nanowire arrays on plastic substrates for ultrasensitive flexible chemical sensors. Nature Mater. 6, 379–384 (2007).10.1038/nmat1891 ↗
6. Park, S-I. et al. Printed assemblies of inorganic light-emitting diodes for deformable and semitransparent displays. Science 325, 977–981 (2009).10.1126/science.1175690 ↗
7. Rogers, J. A. & Huang, Y. A curvy, stretchy future for electronics. Proc. Natl Acad. Sci. USA 106, 10875–10876 (2009).10.1073/pnas.0905723106 ↗
8. Yoon, J. et al. Ultrathin silicon solar microcells for semitransparent, mechanically flexible and microconcentrator module designs. Nature Mater. 7, 907–915 (2008).10.1038/nmat2287 ↗
9. Javey, A., Nam, S., Friedman, R. S., Yan, H. & Lieber, C. M. Layer-by-layer assembly of nanowires for three-dimensional, multifunctional electronics. Nano Lett. 7, 773–777 (2007).10.1021/nl063056l ↗
10. Fan, Z. et al. Wafer-scale assembly of highly ordered semiconductor nanowire arrays by contact printing. Nano Lett. 8, 20–25 (2008).10.1021/nl071626r ↗
11. Fan, Z., Ho, J. C., Jacobson, Z. A., Razavi, H. & Javey, A. Large scale, heterogeneous integration of nanowire arrays for image sensor circuitry. Proc. Natl Acad. Sci. USA 105, 11066–11070 (2008).10.1073/pnas.0801994105 ↗
12. Takahashi, T. et al. Monolayer resist for patterned contact printing of aligned nanowire arrays. J. Am. Chem. Soc. 131, 2102–2103 (2009).10.1021/ja8099954 ↗
13. Yerushalmi, R., Jacobson, Z. A., Ho, J. C., Fan, Z. & Javey, A. Large scale, highly ordered assembly of nanowire parallel arrays by differential roll printing. Appl. Phys. Lett. 91, 203104 (2007).10.1063/1.2813618 ↗
14. Fan, Z. et al. Towards the development of printable nanowire electronics and sensors. Adv. Mater. 21, 3730–3743 (2009).10.1002/adma.200900860 ↗
15. Qing, Q. et al. Nanowire transistor arrays for mapping neural circuits in acute brain slices. Proc. Natl Acad. Sci. USA 107, 1882–1887 (2010).10.1073/pnas.0914737107 ↗
16. Ju, S. et al. Transparent active matrix organic light-emitting diode displays driven by nanowire transistor circuitry. Nano Lett. 8, 997–1004 (2008).10.1021/nl072538+ ↗
17. Someya, T. et al. A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications. Proc. Natl Acad. Sci. USA 101, 9966–9970 (2004).10.1073/pnas.0401918101 ↗
18. Someya, T. et al. Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes. Proc. Natl Acad. Sci. USA 102, 12321–12325 (2005).
19. Xiang, J. et al. Ge/Si nanowire heterostructures as high-performance field-effect transistors. Nature 441, 489–493 (2006).10.1038/nature04796 ↗
20. Ford, A. C. et al. Diameter-dependent electron mobility of InAs nanowires. Nano Lett. 9, 360–365 (2009).10.1021/nl803154m ↗