journal article·2021

Optical study of electron and acoustic phonon confinement in ultrathin-body germanium-on-insulator nanolayers

Vladimir Poborchii, Jesse Groenen, Pavel I. Geshev, Junichi Hattori, Wen Hsin Chang, Hiroyuki Ishii, Toshifumi Irisawa, Tatsuro Maeda

Nanoscale· Volume 13· Issue 21
Publisher page

Abstract

Nanoelectronics require semiconductor nanomaterials with high electron mobility like Ge nanolayers. Phonon and electron states in nanolayers undergo size-dependent changes induced by confinement and surface effects. Confined electrons and acoustic phonons determine layer optical, electric and thermal properties. Despite scientific and practical significance, their experimental studies in individual nanolayers are still lacking. Thanks to recent progress in the fabrication of high-quality nanolayers, here, we report the thickness dependencies of Raman spectra of acoustic phonons and optical spectra of electrons confined in germanium-on-insulator (GeOI) nanolayers with thicknesses TGeOI = 1-20 nm. We show that for TGeOI > 5 nm, both GeOI acoustic phonon Raman spectra and the E1 electron energy gap display dependencies on TGeOI which are reasonably described by the corresponding phonon and electron confinement theories. Accordingly, TGeOI can be probed using acoustic phonon Raman spectra at TGeOI > 5 nm. However, both confinement theories fail to describe GeOI thickness dependencies at TGeOI < 5 nm. We attribute this discrepancy to an increased influence of the Ge-GeO2 interface disorder with TGeOI reduction. The acoustic phonon data suggest a decrease of Ge normal-to-the-layer longitudinal sound velocity. Generation of interface-disorder-induced dispersionless phonons might contribute to this. The change in GeOI phonon properties at TGeOI < 5 nm might influence E1(TGeOI) dependence via a change in the GeOI electron-phonon interaction. We demonstrate that the Al2O3 coating improves the agreement between experimental and confinement theories, probably, via reduction of disorder at the Ge-GeOx-Al2O3-interface. Our results are important for control of nanolayer-confined electrons and phonons with benefits for modern and future nanoelectronic devices.
Source: openalex_inverted_index · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Silicon Nanostructures and Photoluminescence · Semiconductor materials and devices · Nanowire Synthesis and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Nanoelectronics Research Institute

AIST

Tsukuba 305-8565

Japan

CEMES

Université de Toulouse

CNRS

Toulouse

France

Institute of Thermophysics of the Russian Academy of Sciences

Novosibirsk 630090

Russia

References (58)

Show source-provided references
1. P. Y. Yu and M.Cardona , Fundamentals of semiconductors: physics and material properties , Springer Heidelberg , Dordrecht London New York , 4th edn, 201010.1007/978-3-642-00710-1 ↗
2. G. B. Stringfellow , in Energy Efficiency and Renewable Energy Through Nanotechnology , ed. L. Zang , Springer , 2011 , pp. 803–842
3. Barbagiovanni · Appl. Phys. Rev. · 2014 · 1 · 01130210.1063/1.4835095 ↗
4. Zushi · Phys. Rev. B: Condens. Matter Mater. Phys. · 2015 · 91 · 11530810.1103/PhysRevB.91.115308 ↗
5. Kamineni · Appl. Phys. Lett. · 2011 · 99 · 15190310.1063/1.3650470 ↗
6. Xiong · Phys. Rev. B · 2017 · 95 · 180301(R)10.1103/PhysRevB.95.180301 ↗
7. Fonoberov · Nano Lett. · 2006 · 6 · 244210.1021/nl061554o ↗
8. Nika · Appl. Phys. Lett. · 2008 · 93 · 17311110.1063/1.3007986 ↗
9. Hattori · Jan. J. Appl. Phys. · 2010 · 49 · 04DN0910.1143/JJAP.49.04DN09 ↗
10. Uchida · J. Appl. Phys. · 2007 · 102 · 07451010.1063/1.2785957 ↗
11. Balandin · Mater. Today · 2012 · 15 · 26610.1016/S1369-7021(12)70117-7 ↗
12. Donetti · J. Appl. Phys. · 2006 · 100 · 01370110.1063/1.2208849 ↗
13. Kargar · Nat. Commun. · 2016 · 7 · 110.1038/ncomms13400 ↗
14. Lee · Nano Lett. · 2017 · 17 · 774410.1021/acs.nanolett.7b03944 ↗
15. Takagi · Dig. Tech. Pap. – Symp. VLSI Technol. · 2003 · 115
16. Maeda · Thin Solid Films · 2006 · 508 · 34610.1016/j.tsf.2005.07.339 ↗
17. Krishnamohan · ECS Trans. · 2006 · 3 · 68710.1149/1.2355864 ↗
18. Poborchii · Appl. Phys. Lett. · 2016 · 108 · 08310710.1063/1.4942607 ↗
19. Maeda · Microelectron. Eng. · 2013 · 109 · 13310.1016/j.mee.2013.03.069 ↗
20. Maeda · ECS Trans. · 2014 · 64 · 49110.1149/06406.0491ecst ↗
21. Maeda · Appl. Phys. Lett. · 2016 · 109 · 26210410.1063/1.4973405 ↗
22. Chang · IEEE Trans. Electron Devices · 2017 · 64 · 461510.1109/TED.2017.2756061 ↗
23. Cerdeira · Solid State Commun. · 1972 · 10 · 59110.1016/0038-1098(72)90598-4 ↗
24. Poborchii · Appl. Phys. Lett. · 2014 · 105 · 15311210.1063/1.4898672 ↗
25. Poborchii · Appl. Phys. Lett. · 2015 · 106 · 09310710.1063/1.4914031 ↗
26. Poborchii · J. Appl. Physiol. · 2016 · 119 · 15430210.1063/1.4947021 ↗
27. Yu · Solid-State Electron. · 2016 · 115 · 12010.1016/j.sse.2015.08.021 ↗
28. Lee · Appl. Phys. Lett. · 2013 · 102 · 23210710.1063/1.4810002 ↗
29. Groenen · Phys. Rev. B: Condens. Matter Mater. Phys. · 2008 · 77 · 04542010.1103/PhysRevB.77.045420 ↗
30. Sotomayor Torres · Phys. Status Solidi C · 2004 · 1 · 260910.1002/pssc.200405313 ↗
31. Lou · Appl. Phys. Lett. · 2010 · 97 · 14190810.1063/1.3499309 ↗
32. Yaacoub · Appl. Phys. Lett. · 2014 · 104 · 06160110.1063/1.4864790 ↗
33. M. Levinshtein , S.Rumyantsev and M.Shur , Handbook Series on Semiconductor Parameters , World Sci. , Singapore , 1996 , vol. 1
34. Antoniou · J. Appl. Phys. · 1965 · 36 · 187310.1063/1.1714369 ↗
35. Shih · J. Vac. Sci. Technol., A · 1994 · 12 · 32110.1116/1.578875 ↗
36. Cimalla · Mater. Sci. Appl. · 2014 · 5 · 628
37. Liebermann · Rev. High Pressure Sci. Technol. · 1998 · 7 · 7510.4131/jshpreview.7.75 ↗
38. Perevozchikova · J. Phys.: Conf. Ser. · 2015 · 643 · 012100
39. Poborchii · J. Appl. Phys. · 2012 · 112 · 07431710.1063/1.4757598 ↗
40. Balandin · Phys. Rev. B: Condens. Matter Mater. Phys. · 1998 · 58 · 154410.1103/PhysRevB.58.1544 ↗
41. Lin · Appl. Phys. Lett. · 2010 · 97 · 24290210.1063/1.3525371 ↗
42. Li · Microelectron. Eng. · 2011 · 88 · 156410.1016/j.mee.2011.03.136 ↗
43. Aspnes · Phys. Rev. Lett. · 1973 · 31 · 23010.1103/PhysRevLett.31.230 ↗
44. Jellison Jr. · Opt. Mater. · 1992 · 1 · 15110.1016/0925-3467(92)90022-F ↗
45. Jellison Jr. · Phys. Rev. B: Condens. Matter Mater. Phys · 1983 · 28 · 327210.1103/PhysRevB.28.3272 ↗
46. Renucci · Phys. Rev. B: Solid State · 1975 · 11 · 388510.1103/PhysRevB.11.3885 ↗
47. Talochkin · Phys. Rev. B: Condens. Matter Mater. Phys. · 2005 · 72 · 11541610.1103/PhysRevB.72.115416 ↗
48. Milekhin · Nanotechnology · 2002 · 13 · 5510.1088/0957-4484/13/1/312 ↗
49. Cazayous · Phys. Rev. B: Condens. Matter Mater. Phys. · 2004 · 69 · 12532310.1103/PhysRevB.69.125323 ↗
50. Berghuis · J. Mater. Res. · 2021 · 36 · 57110.1557/s43578-020-00052-x ↗
51. Ke · ACS Appl. Electron. Mater. · 2019 · 1 · 31110.1021/acsaelm.8b00071 ↗
52. Zhang · Appl. Phys. Lett. · 2011 · 98 · 11290210.1063/1.3564902 ↗
53. Lannin · Solid State Commun. · 1985 · 53 · 93910.1016/0038-1098(85)90464-8 ↗
54. Volodin · J. Phys. D: Appl. Phys. · 2013 · 46 · 27530510.1088/0022-3727/46/27/275305 ↗
55. Mankad · J. Appl. Phys. · 2012 · 112 · 05431810.1063/1.4747933 ↗
56. Lautenschlager · Phys. Rev. B: Condens. Matter Mater. PhysPhys. Rev. B · 1986 · 33 · 550110.1103/PhysRevB.33.5501 ↗
57. Cardona · Solid State Commun. · 2005 · 133 · 310.1016/j.ssc.2004.10.028 ↗
58. Keldysh · JETP Lett. · 1979 · 29 · 658