journal article·2026-04-15

Micro-Raman Scattering Analysis of Temperature-Dependent Electron Mobility and Fermi Level in n-Doped Homoepitaxial GaN Layers for Power Electronics

Aomar Ezza, Denis Machon, Camille Sonneville, Eric Frayssinet, Yvon Cordier, Dominique Planson, Hassan Maher, Ali Soltani

ACS Applied Materials & Interfaces· Volume 18· Issue 14
Publisher page

Abstract

/V·s in heavily doped layers, with further reductions at elevated temperatures due to thermally activated scattering and carrier redistribution. These results demonstrate that Raman spectroscopy is a powerful nondestructive tool to simultaneously assess electronic transport properties and crystalline disorder in vertical GaN-based power electronics.
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Research context

OpenAlex topics: GaN-based semiconductor devices and materials · Semiconductor Quantum Structures and Devices · 2D Materials and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Institut Interdisciplinaire d’Innovation Technologique (3IT), Université de Sherbrooke, 3000 Boulevard de l’Université, Sherbrooke, Québec J1K0A5, Canada

Laboratoire Nanotechnologies Nanosystèmes (LN2)-IRL3463, CNRS

Université de Sherbrooke, INSA Lyon, Université Grenoble Alpes, École Centrale de Lyon

Laboratoire Ampère, UMR CNRS 5005

Université Lyon, INSA de Lyon, École Centrale de Lyon, Université Claude Bernard Lyon 1

Centre de Recherches sur l’Hétéro-Epitaxie et ses Applications (CRHEA), UMR CNRS 7073, Université Côte d’Azur, Rue Bernard Grégory, Valbonne 06560, France

Funding

Agence Nationale de la Recherche · Fonds de recherche du Qu?bec

References (60)

Show source-provided references
1. 10.1063/5.024101110.1063/5.0241011 ↗
2. 10.1038/s41377-024-01639-310.1038/s41377-024-01639-3 ↗
3. 10.1016/j.fmre.2021.11.02810.1016/j.fmre.2021.11.028 ↗
4. 10.3390/electronics1422443010.3390/electronics14224430 ↗
5. 10.1088/1361-6641/adb32d10.1088/1361-6641/adb32d ↗
6. 10.20517/mre.2022.4710.20517/mre.2022.47 ↗
7. 10.1002/pssb.20030334110.1002/pssb.200303341 ↗
8. 10.4028/www.scientific.net/MSF.778-780.97110.4028/www.scientific.net/MSF.778-780.971 ↗
9. 10.1063/5.019082210.1063/5.0190822 ↗
10. 10.1109/ACCESS.2020.296702710.1109/ACCESS.2020.2967027 ↗
11. 10.4028/www.scientific.net/MSF.740-742.112310.4028/www.scientific.net/MSF.740-742.1123 ↗
12. 10.1049/pel2.1236610.1049/pel2.12366 ↗
13. 10.1109/LED.2017.267854010.1109/LED.2017.2678540 ↗
14. 10.1109/LED.2017.267092510.1109/LED.2017.2670925 ↗
15. 10.3390/electronics805057510.3390/electronics8050575 ↗
16. 10.1002/pssa.20130055810.1002/pssa.201300558 ↗
17. 10.1016/j.pedc.2024.10006510.1016/j.pedc.2024.100065 ↗
18. 10.1063/1.477351010.1063/1.4773510 ↗
19. 10.1103/PhysRevB.72.04542310.1103/PhysRevB.72.045423 ↗
20. 10.1088/1361-6463/ab36e810.1088/1361-6463/ab36e8 ↗
21. 10.1088/1361-6641/ac5e0110.1088/1361-6641/ac5e01 ↗
22. 10.1063/1.134830410.1063/1.1348304 ↗
23. 10.1103/PhysRevB.28.192810.1103/PhysRevB.28.1928 ↗
24. 10.1063/1.496450410.1063/1.4964504 ↗
25. 10.1063/1.314886210.1063/1.3148862 ↗
26. 10.1063/1.494307910.1063/1.4943079 ↗
27. 10.1002/pssb.222119021910.1002/pssb.2221190219 ↗
28. 10.3390/cryst908042810.3390/cryst9080428 ↗
29. 10.1103/PhysRevB.15.217710.1103/PhysRevB.15.2177 ↗
30. 10.1103/PhysRev.124.186610.1103/PhysRev.124.1866 ↗
31. 10.1063/1.474827910.1063/1.4748279 ↗
32. 10.1063/5.017808610.1063/5.0178086 ↗
33. 10.1016/j.jcrysgro.2006.10.22310.1016/j.jcrysgro.2006.10.223 ↗
34. 10.1016/S0038-1101(98)00087-210.1016/S0038-1101(98)00087-2 ↗
35. 10.1063/1.479400910.1063/1.4794009 ↗
36. Feng Z. C. · 202410.1201/9781032644912 ↗
37. 10.3390/nano1503016510.3390/nano15030165 ↗
38. 10.1002/1521-3951(200212)234:3<965::AID-PSSB965>3.0.CO;2-P10.1002/1521-3951(200212)234:3<965::AID-PSSB965>3.0.CO;2-P ↗
39. 10.1088/1674-4926/30/12/12300310.1088/1674-4926/30/12/123003 ↗
40. 10.1039/C9NR01128A10.1039/C9NR01128A ↗
41. 10.1016/j.ssc.2020.11389510.1016/j.ssc.2020.113895 ↗
42. 10.1088/0953-8984/14/38/20110.1088/0953-8984/14/38/201 ↗
43. 10.1016/j.jlumin.2022.11921410.1016/j.jlumin.2022.119214 ↗
44. 10.1063/1.36797210.1063/1.367972 ↗
45. 10.1109/TDMR.2016.261745810.1109/TDMR.2016.2617458 ↗
46. 10.1063/1.12408310.1063/1.124083 ↗
47. 10.1063/1.11580510.1063/1.115805 ↗
48. 10.1063/1.157122010.1063/1.1571220 ↗
49. 10.1063/1.347382610.1063/1.3473826 ↗
50. 10.1103/PhysRevB.56.952410.1103/PhysRevB.56.9524 ↗
51. 10.1063/1.308355410.1063/1.3083554 ↗
52. 10.1063/5.027458410.1063/5.0274584 ↗
53. Grundmann M. · 201610.1007/978-3-319-23880-7 ↗
54. Seeger K. · 200410.1007/978-3-662-09855-4 ↗
55. 10.1103/PhysRev.79.101310.1103/PhysRev.79.1013 ↗
56. Morkoç H. · 2008 · 2
57. Look D. C. · 1989
58. 10.1016/0038-1098(95)00337-110.1016/0038-1098(95)00337-1 ↗
59. 10.1063/1.136464610.1063/1.1364646 ↗
60. Sze S. M. · 200610.1002/0470068329 ↗