journal article·2026-01-14Open access

CMOS-Compatible ZrO 2 -Based Film for Photoplethysmography Sensors Enabling Accurate and Sensitive Health Monitoring

Nuno Estrócio, Ampattu R. Jayakrishnan, Katarzyna Gwozdz, Adrian Kaim, Ji Soo Kim, Alexandre Silva, Veniero Lenzi, Paweł Noszczyk, Surya Nair, Mário A. C. Castro Pereira, Luís S. A. Marques, Robert L. Z. Hoye, Judith L. MacManus-Driscoll, José P. B. Silva

Abstract

Photoplethysmography (PPG) is a simple noninvasive technique for the detection of multiple cardiovascular parameters, such as heart rate, blood oxygen saturation (SpO 2 ), systolic blood pressure, and diastolic blood pressure. However, the current commercial PPG technology is limited by several factors, including rigidity, bulkiness, high cost, high power consumption of ∼10’s mW, poor operational stability under ambient conditions, and susceptibility to motion artifacts. In this work, we overcome many of these limitations using a novel self-powered, miniaturized, low-cost, stable PPG sensor based on a simple CMOS-compatible fluorite-type ferro/pyroelectric Hf x Zr 1– x O 2 thin-film photodetector device. Our novel self-powered photodetector shows 26% higher responsivity and 23% improved sensitivity (perfusion index of 3.7%) for sensing blood volume changes in microvascular tissues compared to conventional PPGs, and a very high accuracy ( < 2% error) in the estimation of SpO 2 . The simple sensor has strong prospects for replacing current PPG sensors for health monitoring applications.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Non-Invasive Vital Sign Monitoring · Analytical Chemistry and Sensors

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Physics Center of Minho and Porto Universities (CF-UM-UP), University of Minho, Campus de Gualtar, 4710-057 Braga, Portugal

Laboratory of Physics for Materials and Emergent Technologies, LapMET

University of Minho

Department of Experimental Physics

Wroclaw University of Science and Technology

Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge CB3 OFS, U.K.

Department of Building Engineering, Faculty of Civil Engineering

Wrocław University of Science and Technology

Inorganic Chemistry Laboratory, Department of Chemistry, University of Oxford, South Parks Road, Oxford OX1 3QR, U.K.

Funding

Royal Academy of Engineering · Minist??rio da Educa????o e Ci??ncia · Engineering and Physical Sciences Research Council (EPSRC) · Royal Academy of Engineering Chair in Emerging Technologies · Horizon 2020 European Commission (EC)

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