Laser Liftoff Enabled Batch Fabrication of Ultrathin Graphene Hall Devices
Abstract
Research context
OpenAlex topics: Graphene research and applications · Advanced Sensor and Energy Harvesting Materials · Magnetic Field Sensors Techniques
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Affiliations
Industrialization Center of Micro & Nano ICs and Devices, Sino-German College of Intelligent Manufacturing, Shenzhen Technology University, Shenzhen 518118, China
Tianjin Key Laboratory of Wireless Mobile Communications and Power Transmission, College of Electronic and Communication Engineering, Tianjin Normal University, Tianjin 300387, China
Department of Intelligence Science and Technology, College of Artificial Intelligence, Tianjin Normal University, Tianjin 300387, China
College of Integrated Circuits and Optoelectronics Chips, Shenzhen Technology University, Shenzhen 518118, China
College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
State Key laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China
Funding
Guangdong Provincial Engineering Technology Research Center for Materials for Advanced MEMS Sensor Chip · Natural Science Foundation of Top Talent of SZTU · the State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment