journal article·2024-10-07Open access

Growth Behavior of Ni on Hydrogen-Etched WS2 Surface

Hui-Ting Liu, Wan-Hsin Chen, Shu-Jui Chang, Chueh-Cheng Yang, Chia-Hsin Wang, Wei-Tung Liu, Kuan-Yu Chen, Naoya Kawakami, Kuan-Bo Lin, Chun-Liang Lin, Chenming Hu

Abstract

High Resolution Image Download MS PowerPoint Slide Transition metal dichalcogenides (TMDs) are 2D materials in which the layers are stacked together by van der Waals forces. Although TMDs are expected to be promising for electronic applications, forming a uniform electrode on them is challenging because of the low adhesion forces between metals and TMDs. This study focuses on improving the quality of metal electrodes by introducing atomic H to create surface defects, using Ni on WS 2 as an example. The detailed effects of H etching and subsequent Ni growth were investigated using scanning tunneling microscopy (STM) and synchrotron-based X-ray photoemission (XPS) techniques. Our studies reveal that introducing point defects of ∼3.05 × 10 11 cm –2 on the WS 2 surface, results in a significant shift in Ni growth from the Volmer–Weber to a near Frank-van der Merwe mode. The origin of the change is the bond formation between the Ni and W atoms, which is expected to realize ohmic contact. The optimization of metal–TMD interfaces offers valuable insights for advanced applications.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: 2D Materials and Applications · MXene and MAX Phase Materials · Chalcogenide Semiconductor Thin Films

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

International College of Semiconductor Technology, Hsinchu 300093, Taiwan

Department of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan

CREDM, Taiwan Semiconductor Manufacturing Company, Hsinchu 30075, Taiwan

National Synchrotron Radiation Research Center, Hsinchu 300092, Taiwan

Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, United States

Funding

National Science and Technology Council

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