journal article·2018-10-31

Reduction and Increase in Thermal Conductivity of Si Irradiated with Ga+via Focused Ion Beam

S. Alaie, M. G. Baboly, Y.-B. Jiang, S. Rempe, D. H. Anjum, S. Chaieb, B. F. Donovan, A. Giri, C. J. Szwejkowski, J. T. Gaskins, M. M. M. Elahi, D. F. Goettler, J. Braun, P. E. Hopkins, Z. C. Leseman

ACS Applied Materials & Interfaces· Volume 10· Issue 43
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Abstract

Focused ion beam (FIB) technology has become a valuable tool for the microelectronics industry and for the fabrication and preparation of samples at the micro/nanoscale. Its effects on the thermal transport properties of Si, however, are not well understood nor do experimental data exist. This paper presents a carefully designed set of experiments for the determination of the thermal conductivity of Si samples irradiated by Ga+ FIB. Generally, the thermal conductivity decreases with increasing ion dose. For doses of >1016 (Ga+/cm2), a reversal of the trend was observed due to recrystallization of Si. This report provides insight on the thermal transport considerations relevant to engineering of Si nanostructures and interfaces fabricated or prepared by FIB.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Thermal properties of materials · Silicon Carbide Semiconductor Technologies · Advancements in Semiconductor Devices and Circuit Design

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Radiology, Weill Cornell Medicine, Cornell University, New York, New York 10065, United States

Department of Engineering, University of Jamestown, Jamestown, North Dakota 58405, United States

Sandia National Laboratories, Albuquerque, New Mexico 87123, United States

Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States

Materials and Structures Laboratory, Tokyo Institute of Technology, Yokohama 226-8503, Japan

Department of Physics, United States Naval Academy, Annapolis, Maryland 21402, United States

Department of Mechanical and Nuclear Engineering, Kansas State University, Manhattan, Kansas 66506, United States

Funding

Air Force Office of Scientific Research · Division of Civil, Mechanical and Manufacturing Innovation · Division of Chemical, Bioengineering, Environmental, and Transport Systems

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