Novel Aspect in Grain Size Control of Nanocrystalline Diamond Film for Thin Film Waveguide Mode Resonance Sensor Application

Nanocrystalline diamond (NCD) thin film growth was systematically investigated for application for the thin film waveguide mode resonance sensor. The NCD thin film was grown on the Si wafer or on the SiO2-coated sapphire substrate using the hot filament chemical vapor deposition (HFCVD). The structural/optical properties of the samples were characterized by the high-resolution scanning electron microscopy (HRSEM), high-resolution transmission electron microscopy (HRTEM), energy dispersive X-ray spectroscopy (EDS), near edge X-ray absorption fine structure (NEXAFS), X-ray diffraction (XRD), and ultraviolet-visible (UV-vis) spectroscopy. The waveguide modes of the NCD layer were studied by prism coupler technique using laser (wavelength: 632.8 nm) with varying incident angle. A novel aspect was disclosed in the grain size dependence on the growth temperature at the relatively low methane concentration in the precursor gas, which was important for optical property: the grain size increased with decreasing growth temperature, which was contrary to the conventional knowledge prevailing in the microcrystalline diamond (MCD) domain. We have provided discussions to reconcile such observation. An optical waveguide mode resonance was demonstrated in the visible region using the microstructure-controlled transparent NCD thin film waveguide, which provided a strong potential for the waveguide mode resonance sensor applications.