journal article·2019-01-23Open access

Role of Penetrability into a Brush-Coated Surface in Directed Self-Assembly of Block Copolymers

Laura Evangelio, Marta Fernández-Regúlez, Jordi Fraxedas, Marcus Müller, Francesc Pérez-Murano

Abstract

High-density and high-resolution line and space patterns on surfaces are obtained by directed self-assembly of lamella-forming block copolymers (BCPs) using wide-stripe chemical guiding patterns. When the width of the chemical pattern is larger than the half-pitch of the BCP, the interaction energy between each BCP domain and the surface is crucial to obtain the desired segregated film morphology. We investigate how the intermixing between BCPs and polymer brush molecules on the surface influences the optimal surface and interface free energies to obtain a proper BCP alignment. We have found that computational models successfully predict the experimentally obtained guided patterns if the penetrability of the brush layer is taken into account instead of a hard, impenetrable surface. Experiments on directed self-assembly of lamella-forming poly(styrene- block-methyl methacrylate) using chemical guiding patterns corroborate the models used in the simulations, where the values of the surface free energy between the BCP and the guiding and background stripes are accurately determined using an experimental method based on the characterization of contact angles in droplets formed after dewetting of homopolymer blends.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Block Copolymer Self-Assembly · Advanced Polymer Synthesis and Characterization · Machine Learning in Materials Science

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Institute of Microelectronics of Barcelona (IMB-CNM, CSIC), Campus de la UAB, 08193, Bellaterra, Spain

Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST, Campus UAB, Bellaterra 08193 Barcelona, Spain

Institute for Theoretical Physics, Georg-August University, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany

Funding

European Commission · Ministerio de Econom?a y Competitividad · Deutsche Forschungsgemeinschaft · Ministerio de Educaci?n, Cultura y Deporte

References (64)

Show source-provided references
1. Moore G. E. · Electronics · 1965 · 38 · 114
2. 10.1007/bf0035302310.1007/bf00353023 ↗
3. 10.1126/science.115762610.1126/science.1157626 ↗
4. 10.1002/adfm.20090222910.1002/adfm.200902229 ↗
5. 10.1117/12.201201810.1117/12.2012018 ↗
6. 10.1002/adma.20080082610.1002/adma.200800826 ↗
7. 10.1021/ma902494v10.1021/ma902494v ↗
8. 10.1021/acsnano.5b0261310.1021/acsnano.5b02613 ↗
9. 10.1126/science.275.5305.145810.1126/science.275.5305.1458 ↗
10. 10.1021/am507727f10.1021/am507727f ↗
11. 10.1002/adma.20100166910.1002/adma.201001669 ↗
12. 10.7567/jjap.53.06jc0510.7567/jjap.53.06jc05 ↗
13. 10.1002/adma.20100166910.1002/adma.201001669 ↗
14. 10.1063/1.151935610.1063/1.1519356 ↗
15. 10.1126/science.116810810.1126/science.1168108 ↗
16. Tiron, R.; Chevalier, X.; Gaugiran, S.; Pradelles, J.; Fontaine, H.; Couderc, C.; Pain, L.; Navarro, C.; Chevolleau, T.; Cunge, G.; Delalande, M.; Fleury, G.; Hadziioannou, G. Pattern Density Multiplication by Direct Self Assembly of Block Copolymers: Toward 300mm CMOS Requirements. Alternative Lithographic Technologies IV, 2012, Vol. 8323, 83230O.10.1117/12.916400 ↗
17. 10.1038/nature0177510.1038/nature01775 ↗
18. 10.1021/ma052335c10.1021/ma052335c ↗
19. 10.1021/ma302464n10.1021/ma302464n ↗
20. 10.1016/s1369-7021(06)71619-410.1016/s1369-7021(06)71619-4 ↗
21. 10.1021/ma102856t10.1021/ma102856t ↗
22. 10.2494/photopolymer.26.57310.2494/photopolymer.26.573 ↗
23. 10.1021/nn301306v10.1021/nn301306v ↗
24. 10.1021/acsami.5b0248110.1021/acsami.5b02481 ↗
25. 10.1021/acsami.5b1056210.1021/acsami.5b10562 ↗
26. 10.1021/mz500234910.1021/mz5002349 ↗
27. 10.1021/acsnano.6b0366710.1021/acsnano.6b03667 ↗
28. 10.1021/acs.chemmater.6b0363310.1021/acs.chemmater.6b03633 ↗
29. 10.1021/acsnano.6b0565710.1021/acsnano.6b05657 ↗
30. 10.3762/bjnano.8.19810.3762/bjnano.8.198 ↗
31. 10.1002/polb.2038510.1002/polb.20385 ↗
32. 10.1039/b602610a10.1039/b602610a ↗
33. 10.1021/ma802604710.1021/ma8026047 ↗
34. 10.1021/ma202311e10.1021/ma202311e ↗
35. 10.1002/pi.528510.1002/pi.5285 ↗
36. 10.1021/acsami.5b0220110.1021/acsami.5b02201 ↗
37. 10.1063/1.224531010.1063/1.2245310 ↗
38. 10.1021/acs.macromol.5b0226210.1021/acs.macromol.5b02262 ↗
39. 10.1103/physrevlett.69.178810.1103/physrevlett.69.1788 ↗
40. 10.1063/1.47977810.1063/1.479778 ↗
41. 10.1021/jp045647a10.1021/jp045647a ↗
42. 10.1016/j.polymer.2012.07.03710.1016/j.polymer.2012.07.037 ↗
43. 10.1021/ma00122a04910.1021/ma00122a049 ↗
44. 10.1007/s00397000010510.1007/s003970000105 ↗
45. 10.1021/la991500c10.1021/la991500c ↗
46. 10.1021/ma970675v10.1021/ma970675v ↗
47. 10.1021/nn403616r10.1021/nn403616r ↗
48. 10.1021/acsnano.6b0539010.1021/acsnano.6b05390 ↗
49. 10.1002/app.1969.07013081510.1002/app.1969.070130815 ↗
50. 10.1021/ma060756410.1021/ma0607564 ↗
51. 10.1051/jp2:199615910.1051/jp2:1996159 ↗
52. 10.1039/c5sm01951f10.1039/c5sm01951f ↗
53. 10.1103/physrevlett.107.14830410.1103/physrevlett.107.148304 ↗
54. 10.1063/1.496859910.1063/1.4968599 ↗
55. Leibler, L.; Ajdari, A.; Mourran, A.; Coulon, G.; Chatenay, D. Wetting of Grafted Polymer Surfaces by Compatible Chains In Ordering in Macromolecular Systems: Proceedings of the OUMS’93 Toyonaka, Osaka, Japan, 3–6 June 1993; Teramoto, A., Kobayashi, M., Norisuye, T., Eds. Springer Berlin Heidelberg: Berlin, 1994; pp 301–311.10.1007/978-3-642-78893-2_25 ↗
56. 10.1039/fd994980020310.1039/fd9949800203 ↗
57. 10.1021/nn700164p10.1021/nn700164p ↗
58. 10.1021/ma801574510.1021/ma8015745 ↗
59. 10.1002/smll.20140097110.1002/smll.201400971 ↗
60. 10.4028/www.scientific.net/ssp.99-100.17510.4028/www.scientific.net/ssp.99-100.175 ↗
61. 10.1021/acsami.5b0835810.1021/acsami.5b08358 ↗
62. 10.1021/nn502260510.1021/nn5022605 ↗
63. 10.1007/s10955-011-0302-z10.1007/s10955-011-0302-z ↗
64. 10.1103/physreve.62.528110.1103/physreve.62.5281 ↗