journal article·2010-05-26

Ring-Opening-Induced Toughening of a Low-Permittivity Polymer−Metal Interface

B. Singh, S. Garg, J. Rathore, R. Moore, N. Ravishankar, L. Interrante, Ganpati Ramanath

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Abstract

Integrating low dielectric permittivity (low-k) polymers to metals is an exacting fundamental challenge because poor bonding between low-polarizability moieties and metals precludes good interfacial adhesion. Conventional adhesion-enhancing methods such as using intermediary layers are unsuitable for engineering polymer/metal interfaces for many applications because of the collateral increase in dielectric permittivity. Here, we demonstrate a completely new approach without surface treatments or intermediary layers to obtain an excellent interfacial fracture toughness of >13 J/m(2) in a model system comprising copper and a cross-linked polycarbosilane with k approximately 2.7 obtained by curing a cyclolinear polycarbosilane in air. Our results suggest that interfacial oxygen catalyzed molecular ring-opening and anchoring of the opened ring moieties of the polymer to copper is the main toughening mechanism. This novel approach of realizing adherent low-k polymer/metal structures without intermediary layers by activating metal-anchoring polymer moieties at the interface could be adapted for applications such as device wiring and packaging, and laminates and composites.
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Research context

OpenAlex topics: Copper Interconnects and Reliability · Molecular Junctions and Nanostructures · Electronic Packaging and Soldering Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Materials Science and Engineering Department and Department of Chemistry, Rensselaer Polytechnic Institute, Troy, New York 12180, College of Nanoscale Science & Engineering, State University of New York, Albany, New York 12203, and Materials Research Centre, Indian Institute of Science, Bangalore, India

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