Amorphous Metal/Oxide Nanolaminate

E. William Cowell III; Christopher C. Knutson; John F. Wager; Douglas A. Keszler

doi:10.1021/am100283m

journal article·2010-07-28

Amorphous Metal/Oxide Nanolaminate

E. William Cowell III, Christopher C. Knutson, John F. Wager, Douglas A. Keszler

ACS Applied Materials & Interfaces· Volume 2· Issue 7

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Source abstract

Abstract

Bilayers of sputtered amorphous multicomponent metal films (AMMFs) and solution deposited amorphous oxide films have been reproducibly deposited with varying thicknesses of 20, 25, and 30 nm to form ordered nanolaminates. Interdiffusion is observed at the AMMF-oxide boundary, leading to unique interface chemistries that are dictated by the nature and order of the deposition processes.

Source: openalex_inverted_index · Quality: baseline

Research context

Nanomaterials Materials processing

OpenAlex topics: Semiconductor materials and devices · Ferroelectric and Piezoelectric Materials · Electronic and Structural Properties of Oxides

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Electrical Engineering and Computer Science, Oregon State University, Corvallis, Oregon 97331-5501, and Department of Chemistry, Oregon State University, Corvallis, Oregon 97331-4003

References (14)

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