Interfaces in Nano-/Microcrystalline Multigrade CVD Diamond Coatings
Source abstract
Abstract
The interfaces of multilayered CVD diamond films grown by the hot-filament technique were characterized with high detail using HRTEM, STEM-EDX, and EELS. The results show that at the transition from micro- (MCD) to nanocrystalline diamond (NCD), a thin precursor graphitic film is formed, irrespectively of the NCD gas chemistry used (with or without argon). On the contrary, the transition of the NCD to MCD grade is free of carbon structures other than diamond, the result of a higher substrate temperature and more abundant atomic H in the gas chemistry. At those transitions WC nanoparticles could be found due to contamination from the filament, being also present at the first interface of the MCD layer with the silicon nitride substrate.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Materials and Ceramic Engineering, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal
Divisão de Metrologia de Materiais - DIMAT, Inmetro, Av. Nossa Senhora das Graças 50, Xerém, Duque de Caxias, Rio de Janeiro, 25250-020, Brazil
PPGMicro - Instituto de Física, Universidade Federal do Rio Grande do Sul, PortoAlegre, Rio Grande do Sul, 91501-970, Brazil
Centro de Tecnologia SENAI Solda, Rua São Francisco Xavier, 601, Maracanã, Rio de Janeiro, 20550-011, Brazil
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