Study on Deformation Behavior of Glass in High-temperature Molding for Massive Unit Microlens Arrays

Microlens arrays (MLAs) with a large number of units, known as massive unit microlens arrays (MUMLAs), are increasingly sought after for their ability to achieve high-power conversion in infrared optical systems. Precision glass molding (PGM) is considered the ideal manufacturing method for MUMLAs. However, the stress distribution and deformation behavior during molding lack detailed understanding, resulting in poor filling consistency and forming accuracy. Consequently, this leads to inconsistent diffuse spot size and irradiance in MUMLAs. This study aims to comprehensively analyze the glass filling behavior during the molding process of MUMLAs using both simulation and experimental approaches. It explains the impact of glass filling behavior and consistency on the optical performance of MUMLAs. Additionally, the effects of molding parameters on the filling consistency of the lenses are investigated. By optimizing these parameters, a high-consistency 128 × 128 MUMLA is fabricated.