journal article·2024-01-31Open access

Temperature Sensitivity Control of an Inkjet-Printed Optical Resonator on Pillar

Marc-Antoine Bianki, Régis Guertin, Cédric Lemieux-Leduc, Yves-Alain Peter

Abstract

We report a whispering gallery mode resonator on a pillar using inkjet printing combined with traditional microfabrication techniques. This approach enables several different polymers on the same chip for sensing applications. However, polymers inherently exhibit sensitivity to multiple stimuli. To mitigate temperature sensitivity, careful selection of design parameters is crucial. By precisely tuning the undercut-to-radius ratio of the resonator, a linear dependence in temperature sensitivity ranging from -41.5 pm/°C to 23.4 pm/°C, with a zero-crossing point at 47.6% is achieved. Consequently, it is feasible to fabricate sensing devices based on undercut microdroplets with minimal temperature sensitivity. The lowest measured temperature sensitivity obtained was 5.9 pm/°C, for a resonator with an undercut-to-radius ratio of 53%.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Photonic and Optical Devices · Mechanical and Optical Resonators · Advanced Fiber Optic Sensors

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Engineering Physics, Polytechnique Montréal, Montréal, Quebec H3T 1J4, Canada

Funding

Natural Sciences and Engineering Research Council of Canada · Fonds de recherche du Qu?bec - Nature et technologies

References (44)

Show source-provided references
1. 10.1039/C9MH00490D10.1039/C9MH00490D ↗
2. 10.1039/C9CS00459A10.1039/C9CS00459A ↗
3. 10.1021/acsami.5b0141310.1021/acsami.5b01413 ↗
4. 10.1016/S0924-4247(99)00275-710.1016/S0924-4247(99)00275-7 ↗
5. 10.1016/j.snb.2019.12740610.1016/j.snb.2019.127406 ↗
6. 10.1002/adma.20170003710.1002/adma.201700037 ↗
7. 10.1016/j.optmat.2020.11002410.1016/j.optmat.2020.110024 ↗
8. 10.1021/acsami.1c1449910.1021/acsami.1c14499 ↗
9. 10.1364/OE.41770310.1364/OE.417703 ↗
10. 10.1016/j.snb.2021.12965510.1016/j.snb.2021.129655 ↗
11. 10.1038/srep1062310.1038/srep10623 ↗
12. 10.1364/OL.41299310.1364/OL.412993 ↗
13. 10.3390/polym1104073910.3390/polym11040739 ↗
14. 10.1021/acsami.9b1963210.1021/acsami.9b19632 ↗
15. 10.17222/mit.2015.18010.17222/mit.2015.180 ↗
16. Kiaee, M. M.; Maeder, T.; Brugger, J. Film Morphology Effect on Voc Sensor Performance Fabricated by Drop-On-Demand Inkjet-Printing. Proc. Actuators and Microsystems Eurosensors XXXIII (TRANSDUCERS EUROSENSORS XXXIII) 2019 20Th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors Xxxiii, 2019, pp 1361–1364.10.1109/TRANSDUCERS.2019.8808652 ↗
17. 10.1016/j.polymertesting.2018.03.02410.1016/j.polymertesting.2018.03.024 ↗
18. 10.1016/j.optlastec.2021.10714710.1016/j.optlastec.2021.107147 ↗
19. 10.1109/JPHOT.2023.324282010.1109/JPHOT.2023.3242820 ↗
20. 10.1364/OE.45974310.1364/OE.459743 ↗
21. 10.1109/JSEN.2022.315399310.1109/JSEN.2022.3153993 ↗
22. 10.1016/j.optlastec.2022.10795110.1016/j.optlastec.2022.107951 ↗
23. 10.1364/OL.42760610.1364/OL.427606 ↗
24. 10.1002/advs.20180212810.1002/advs.201802128 ↗
25. 10.1016/j.measurement.2022.11119910.1016/j.measurement.2022.111199 ↗
26. 10.1364/OL.32.00180010.1364/OL.32.001800 ↗
27. Fakhfouri, V.; Cantale, N.; Mermoud, G.; Kim, J.; Boiko, D.; Charbon, E.; Martinoli, A.; Brugger, J. Inkjet Printing of SU-8 for Polymer-Based MEMS a Case Study for Microlenses. 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008.10.1109/MEMSYS.2008.4443679 ↗
28. 10.1016/j.mee.2010.12.00410.1016/j.mee.2010.12.004 ↗
29. 10.1049/mnl.2013.024110.1049/mnl.2013.0241 ↗
30. 10.1016/j.polymer.2019.12193310.1016/j.polymer.2019.121933 ↗
31. 10.1016/j.snb.2016.09.13610.1016/j.snb.2016.09.136 ↗
32. 10.1016/j.cclet.2017.09.03110.1016/j.cclet.2017.09.031 ↗
33. 10.1021/la702684710.1021/la7026847 ↗
34. 10.1364/OE.26.00023310.1364/OE.26.000233 ↗
35. 10.1039/C8NR10007A10.1039/C8NR10007A ↗
36. Su-8 2000 Permanent Epoxy Negative Photoresist. version 4; MicroChem, 2020.
37. 10.1109/lpt.2009.202596710.1109/lpt.2009.2025967 ↗
38. 10.1016/j.optcom.2012.05.02810.1016/j.optcom.2012.05.028 ↗
39. 10.1016/j.optcom.2015.07.05710.1016/j.optcom.2015.07.057 ↗
40. 10.1088/0960-1317/13/1/31210.1088/0960-1317/13/1/312 ↗
41. 10.1007/s00339-008-4966-410.1007/s00339-008-4966-4 ↗
42. 10.1016/j.polymer.2006.05.03510.1016/j.polymer.2006.05.035 ↗
43. 10.3390/chemosensors1006022810.3390/chemosensors10060228 ↗
44. 10.1364/OE.24.02082510.1364/OE.24.020825 ↗