DataVXACS Applied Materials & InterfacesPaper
journal article·2020-03-04

Commensurability-Driven Orientation Control during Block Copolymer Directed Self-Assembly

Hyun Su Yun, Hyung Wan Do, Karl K. Berggren, Caroline A. Ross, Hong Kyoon Choi

ACS Applied Materials & Interfaces· Volume 12· Issue 9
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Source abstract

Abstract

In this study, the orientation of block copolymer (BCP) patterns in topographical templates is controlled using a simple template design rule. The orientation of the pattern is selected by using a template with one commensurate dimension and one incommensurate dimension. An array of binary states of a BCP pattern can be programmed into a desired layout by tuning of the template wall thickness.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Block Copolymer Self-Assembly · Advanced Polymer Synthesis and Characterization · Nanofabrication and Lithography Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Division of Advanced Materials Engineering, Kongju National University, Cheonan 31080, Republic of Korea

Department of Chemical & Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea

Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States

Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States

Funding

National Research Foundation of Korea

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