Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO2/Si Substrate
Abstract
Research context
OpenAlex topics: Gas Sensing Nanomaterials and Sensors · Analytical Chemistry and Sensors · Graphene research and applications
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Affiliations
Advanced Research Institute for Multidisciplinary Science, Beijing Institute of Technology, Beijing 100081, China
Center for Interdisciplinary Science of Optical Quantum and NEMS Integration, Beijing Institute of Technology, Beijing 100081, China
School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
Advanced Interdisciplinary Technology Research Center, National Innovation Institute of Defense Technology, 100071 Beijing, China
State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
National Key Laboratory for Electronic Measurement Technology, School of Instrument and Electronics, North University of China, Taiyuan 030051, China
Beijing Institute of Technology, Zhuhai, Beijing Institute of Technology, Zhuhai 519088, China
Funding
National Key Research and Development Program of China · National Outstanding Youth Science Fund Project of National Natural Science Foundation of China · Beijing Institute of Technology · Natural Science Foundation of Beijing Municipality · National Natural Science Foundation of China · 173 Technical Field Fund