DataVXMicroscopy and MicroanalysisPaper
journal article·2019-08Open access

Towards Routine EDX Tomography in Semiconductor Failure Analysis

Frieder H. Baumann, Brian Popielarski, Travis Mitchell, Yinggang Lu

Microscopy and Microanalysis· Volume 25· Issue S2
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Electronic materials

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices · Electron and X-Ray Spectroscopy Techniques

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References (4)

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2. 10.1016/j.micron.2013.01.00410.1016/j.micron.2013.01.004 ↗
3. Genç · Microscopy and Analysis · 116 · 23
4. 10.1017/S143192761600225710.1017/S1431927616002257 ↗