journal article·2019-08Open access

Opportunities and Challenges in APT Metrology for Semiconductor Applications

Claudia Fleischmann, Ramya Cuduvally, Richard Morris, Davit Melkonyan, Jonathan Op de Beeck, Igor Makhotkin, Paul van der Heide, Wilfried Vandervorst

Microscopy and Microanalysis· Volume 25· Issue S2

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Advanced Materials Characterization Techniques · Surface and Thin Film Phenomena · Electron and X-Ray Spectroscopy Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (21)

Show source-provided references
1. http://www.vamas.org/twa/projects.html (accessed February 22, 2019).
2. Morris · APTandM 2018 · 2018
3. Ling · APTandM 2018 · 2018
4. van der Heide · MandM 2019 · 2019
5. Kouzminov · APTandM 2018 · 2018
6. 10.1016/j.ultramic.2010.11.01910.1016/j.ultramic.2010.11.019 ↗
7. 10.1016/j.ultramic.2018.03.01810.1016/j.ultramic.2018.03.018 ↗
8. 10.1088/1367-2630/18/3/03303110.1088/1367-2630/18/3/033031 ↗
9. 10.1016/j.ultramic.2016.11.02310.1016/j.ultramic.2016.11.023 ↗
10. Cuduvally · APTandM 2018 · 2018
11. 10.1016/j.scriptamat.2016.12.03410.1016/j.scriptamat.2016.12.034 ↗
12. 10.1021/jp507126410.1021/jp5071264 ↗
13. 10.1016/j.jnucmat.2018.03.05710.1016/j.jnucmat.2018.03.057 ↗
14. Melkonyan · APTandM 2018 · 2018
15. 10.1103/PhysRevA.95.06140110.1103/PhysRevA.95.061401 ↗
16. 10.1016/j.ultramic.2017.04.00610.1016/j.ultramic.2017.04.006 ↗
17. 10.1016/j.ultramic.2018.08.01010.1016/j.ultramic.2018.08.010 ↗
18. 10.1016/j.ultramic.2015.07.00910.1016/j.ultramic.2015.07.009 ↗
19. 10.1116/1.501969310.1116/1.5019693 ↗
20. Dialameh · APTandM 2018 · 2018
21. 10.1016/j.ultramic.2017.12.01310.1016/j.ultramic.2017.12.013 ↗