Ion-Irradiated Damage in Semiconductors Visualized by Means of Low-kV Scanning Electron Microscopy

Iwona Jozwik; Adam Barcz; Ewa Dumiszewska; Elzbieta Dabrowska

doi:10.1017/s1431927619003167

journal article·2019-08Open access

Ion-Irradiated Damage in Semiconductors Visualized by Means of Low-kV Scanning Electron Microscopy

Iwona Jozwik, Adam Barcz, Ewa Dumiszewska, Elzbieta Dabrowska

Microscopy and Microanalysis· Volume 25· Issue S2

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Iwona Jozwik, Adam Barcz, Ewa Dumiszewska, Elzbieta Dabrowska; Ion-Irradiated Damage in Semiconductors Visualized by Means of Low-kV Scanning Electron Micr

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Electronic materials

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis · Advanced Materials Characterization Techniques

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References (8)

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5. Patterson · Proceedings of The 17th Annual SEMI/IEEE ASMC 2006 Conference

6. 10.1149/2.0191707jss10.1149/2.0191707jss ↗

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8. The authors acknowledge funding from the National Science Centre, Poland, Grant Number 2017/27/B/ST8/01158.