Development of Automated Micro-Sampling System and Application to Semiconductor Devices
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Abstract
Takahiro Sato, Yuka Aizawa, Masato Suzuki, Satoshi Tomimatsu, Junich Katane; Development of Automated Micro-Sampling System and Application to Semiconducto
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Industrial Vision Systems and Defect Detection
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (1)
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1. Proc. 25th Int. Symp. Testing and Failure Analysis · 1999 · 499