journal article·2018-08Open access

Strain Characterization of Advanced CMOS Transistors: An Industry Perspective

Jiong Zhang, Xiaojun Weng, Renliang Yuan, Ling Pan, Han Li, Markus Kuhn, Kevin Johnson, Jian-Min Zuo, Zhiyong Ma

Microscopy and Microanalysis· Volume 24· Issue S1

Abstract

Jiong Zhang, Xiaojun Weng, Renliang Yuan, Ling Pan, Han Li, Markus Kuhn, Kevin Johnson, Jian-Min Zuo, Zhiyong Ma; Strain Characterization of Advanced CMOS
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Advancements in Semiconductor Devices and Circuit Design · Semiconductor materials and devices · Integrated Circuits and Semiconductor Failure Analysis

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References (3)

Show source-provided references
1. Microsc. Microanal · 2015 · 2333
2. IEDM · 2003 · 11.6.1
3. IEEE Trans. Electron Devices · 2004 · 1790