Correlative HAADF-STEM and EDX-STEM Tomography for the 3D Morphological and Elemental Analysis of FinFET Semiconductor Devices
Source abstract
Abstract
Julien Sorel, Martin Jacob, Toby Sanders, Adeline Grenier, Rafael Bortolin Pinheiro, Frederic Mazen, Thierry Epicier, Zineb Saghi; Correlative HAADF-STEM a
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Semiconductor materials and devices · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis
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References (4)
Show source-provided references
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3. Adv. Struct. Chem. Imaging · 2015 · 1
4. Microsc. Microanal. · 2005 · 111 · 378