Challenges and Opportunities in 3D Tri-gate Transistor Characterization
Source abstract
Abstract
Jiong Zhang, Ling Pan, Andrew A.Herzing, Ray Twesten, Paolo Longo, Noel Franco, Kevin Johnson, Zhiyong Ma; Challenges and Opportunities in 3D Tri-gate Tran
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advancements in Photolithography Techniques · Electron and X-Ray Spectroscopy Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. 10.1109/83.65084810.1109/83.650848 ↗
2. IEDM · 1989 · 833
3. Technology · 2012 · 131