Quantitative Strain Measurement in Semiconductor Devices by Scanning Moiré Fringe Imaging
Source abstract
Abstract
Suhyun Kim, Sungho Lee, Younheum Jung, Joong Jung Kim, Gwangseon Byun, Sunyoung Lee, Heabum Lee; Quantitative Strain Measurement in Semiconductor Devices b
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices · Electron and X-Ray Spectroscopy Techniques
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