Observation of cross sectional semiconductor sample with newly developed SEI/STEM/TEM microscope
Source abstract
Abstract
N Endo, T Kuba, T Suzuki, E Okunishi, M Kersker; Observation of cross sectional semiconductor sample with newly developed SEI/STEM/TEM microscope, Microsco
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications
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