Deep Learning-based Automated Measurement Method for Cross-sectional SEM Images in Semiconductor Devices
Source abstract
Abstract
Yutaka Okuyama, Takeshi Ohmori; Deep Learning-based Automated Measurement Method for Cross-sectional SEM Images in Semiconductor Devices, Microscopy and Mi
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Industrial Vision Systems and Defect Detection · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. Goodfellow · Deep Learning · 2016
2. 10.1109/TPAMI.2016.257703110.1109/TPAMI.2016.2577031 ↗
3. 10.1109/TPAMI.2016.264461510.1109/TPAMI.2016.2644615 ↗