Radial Interference Contrast in in-situ SEM Observation of Metal Oxide Semiconductor Film Crystallization

Kunji Shigeto; Takio Kizu; Kazuhito Tsukagoshi; Toshihide Nabatame

doi:10.1017/s1431927617008224

journal article·2017-07Open access

Radial Interference Contrast in in-situ SEM Observation of Metal Oxide Semiconductor Film Crystallization

Kunji Shigeto, Takio Kizu, Kazuhito Tsukagoshi, Toshihide Nabatame

Microscopy and Microanalysis· Volume 23· Issue S1

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Abstract

Kunji Shigeto, Takio Kizu, Kazuhito Tsukagoshi, Toshihide Nabatame; Radial Interference Contrast in in-situ SEM Observation of Metal Oxide Semiconductor Fi

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OpenAlex topics: Thin-Film Transistor Technologies · Advanced Electron Microscopy Techniques and Applications · Ion-surface interactions and analysis

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References (4)

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3. 10.1063/1.482217510.1063/1.4822175 ↗

4. 10.1038/asiamat.2010.510.1038/asiamat.2010.5 ↗