DataVXMicroscopy and MicroanalysisPaper
journal article·2015-08

High-accuracy electron tomography of semiconductor devices

Misa Hayashida, Lina Gunawan, Marek Malac, Chris Pawlowicz, Martin Couillard

Microscopy and Microanalysis· Volume 21· Issue S3
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Abstract

Misa Hayashida, Lina Gunawan, Marek Malac, Chris Pawlowicz, Martin Couillard; High-accuracy electron tomography of semiconductor devices, Microscopy and Mi
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

Electronic materials

OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis

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References (2)

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1. 10.1016/j.micron.2011.07.00310.1016/j.micron.2011.07.003 ↗
2. 10.1016/j.ultramic.2014.04.00510.1016/j.ultramic.2014.04.005 ↗