Characterization of Defects in III-V Semiconductor Materials (InP, GaAs and InGaAs/ InP on Si) in Nano-sized Patterns by Transmission Electron Microscopy
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Abstract
JH Lee, YD Cho, IG Lee, CS Shin, WK Park, DH Kim, DH Ko; Characterization of Defects in III-V Semiconductor Materials (InP, GaAs and InGaAs/ InP on Si) in
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques
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References (3)
Show source-provided references
1. 10.1063/1.297303710.1063/1.2973037 ↗
2. Journal of applied physics · 2013 · 46 · 035306
3. 10.1109/LED.2008.91781710.1109/LED.2008.917817 ↗