journal article·2016-07Open access

Characterization of Defects in III-V Semiconductor Materials (InP, GaAs and InGaAs/ InP on Si) in Nano-sized Patterns by Transmission Electron Microscopy

J.H. Lee, Y.D. Cho, I.G. Lee, C.S. Shin, W.K. Park, D.H. Kim, D.H. Ko

Microscopy and Microanalysis· Volume 22· Issue S3

Abstract

JH Lee, YD Cho, IG Lee, CS Shin, WK Park, DH Kim, DH Ko; Characterization of Defects in III-V Semiconductor Materials (InP, GaAs and InGaAs/ InP on Si) in
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques

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References (3)

Show source-provided references
1. 10.1063/1.297303710.1063/1.2973037 ↗
2. Journal of applied physics · 2013 · 46 · 035306
3. 10.1109/LED.2008.91781710.1109/LED.2008.917817 ↗