journal article·2009-07Open access

Application of Lattice Strain Analysis of Semiconductor Device by Nano-beam Diffraction Using the 300 kV Cold-FE TEM

T Sato, H Matsumoto, M Konno, M Fukui, I Nagaoki, Y Taniguchi

Microscopy and Microanalysis· Volume 15· Issue S2

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short

Research context

OpenAlex topics: Advanced Surface Polishing Techniques · Optical Coatings and Gratings · Anodic Oxide Films and Nanostructures

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References

Reference metadata was not supplied for this record.