Measurement of Electrostatic Potentials in Semiconductor Devices by Off-axis Electron Holography

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Research context

OpenAlex topics: Advancements in Semiconductor Devices and Circuit Design · Surface and Thin Film Phenomena · Quantum and electron transport phenomena

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Affiliations

Univ. Grenoble Alpes , CEA, LETI, Grenoble , France

Interdisciplinary Center for Electron Microscopy , EPFL, Lausanne , Switzerland

References (5)