journal article·2023-07-22Open access

Multimodal Analysis of InAs/InGaAlAs Quantum Dots Using Transmission Electron Microscopy and Atom Probe Tomography

Yudai Yamaguchi, Yuta Inaba, Ryoji Arai, Yuya Kanitani, Yoshihiro Kudo, Michinori Shiomi, Daiji Kasahara, Mikihiro Yokozeki, Noriyuki Fuutagawa, Jun Uzuhashi, Tadakatsu Ohkubo, Kazuhiro Hono, Kouichi Akahane, Naokatsu Yamamoto, Shigetaka Tomiya

Microscopy and Microanalysis· Volume 29· Issue Supplement_1

Abstract

Journal Article Multimodal Analysis of InAs/InGaAlAs Quantum Dots Using Transmission Electron Microscopy and Atom Probe Tomography Get access Yudai Yamaguchi, Yudai Yamaguchi Sony Semiconductor Solutions Corporation, Atsugi, Kanagawa, Japan Corresponding author: Yudai.Yamaguchi@sony.com Search for other works by this author on: Oxford Academic Google Scholar Yuta Inaba, Yuta Inaba Sony Semiconductor Solutions Corporation, Atsugi, Kanagawa, Japan Search for other works by this author on: Oxford Academic Google Scholar Ryoji Arai, Ryoji Arai Sony Semiconductor Solutions Corporation, Atsugi, Kanagawa, Japan Search for other works by this author on: Oxford Academic Google Scholar Yuya Kanitani, Yuya Kanitani Sony Semiconductor Solutions Corporation, Atsugi, Kanagawa, Japan Search for other works by this author on: Oxford Academic Google Scholar Yoshihiro Kudo, Yoshihiro Kudo Sony Semiconductor Solutions Corporation, Atsugi, Kanagawa, Japan Search for other works by this author on: Oxford Academic Google Scholar Michinori Shiomi, Michinori Shiomi Sony Semiconductor Solutions Corporation, Atsugi, Kanagawa, Japan Search for other works by this author on: Oxford Academic Google Scholar Daiji Kasahara, Daiji Kasahara Sony Semiconductor Solutions Corporation, Atsugi, Kanagawa, Japan Search for other works by this author on: Oxford Academic Google Scholar Mikihiro Yokozeki, Mikihiro Yokozeki Sony Semiconductor Solutions Corporation, Atsugi, Kanagawa, Japan Search for other works by this author on: Oxford Academic Google Scholar Noriyuki Fuutagawa, Noriyuki Fuutagawa Sony Semiconductor Solutions Corporation, Atsugi, Kanagawa, Japan Search for other works by this author on: Oxford Academic Google Scholar Jun Uzuhashi, Jun Uzuhashi National Institute for Materials Science, Tsukuba, Ibaraki, Japan Search for other works by this author on: Oxford Academic Google Scholar ... Show more Tadakatsu Ohkubo, Tadakatsu Ohkubo National Institute for Materials Science, Tsukuba, Ibaraki, Japan Search for other works by this author on: Oxford Academic Google Scholar Kazuhiro Hono, Kazuhiro Hono National Institute for Materials Science, Tsukuba, Ibaraki, Japan Search for other works by this author on: Oxford Academic Google Scholar Kouichi Akahane, Kouichi Akahane National Institute of Information and Communications Technology, Koganei, Tokyo, Japan Search for other works by this author on: Oxford Academic Google Scholar Naokatsu Yamamoto, Naokatsu Yamamoto National Institute of Information and Communications Technology, Koganei, Tokyo, Japan Search for other works by this author on: Oxford Academic Google Scholar Shigetaka Tomiya Shigetaka Tomiya Sony Semiconductor Solutions Corporation, Atsugi, Kanagawa, Japan Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 29, Issue Supplement_1, 1 August 2023, Pages 1970–1971, https://doi.org/10.1093/micmic/ozad067.1020 Published: 22 July 2023
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Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Materials Characterization Techniques

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Affiliations

Sony Semiconductor Solutions Corporation , Atsugi, Kanagawa , Japan

National Institute for Materials Science , Tsukuba, Ibaraki , Japan

National Institute of Information and Communications Technology , Koganei, Tokyo , Japan

References (7)

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