High Contrast SEM Observation of Semiconductor Dopant Profile using TripleBeam® System
Source abstract
Abstract
Yuka Aizawa, Takahiro Sato, Takeshi Sunaoshi, Hiroaki Matsumoto, Toshihide Agemura, Shota Torikawa, Ikuko Nakatani, Masahiro Kiyohara; High Contrast SEM Ob
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (2)
Show source-provided references
1. Takahashi · Proc. 16th International microscopy congress · 2006 · 1104
2. Sunaoshi T , et al Proceedings of the 2016 IEEE 23rd IPFA, p.148.10.1109/IPFA.2016.7564268 ↗