TEM Specimen Preparation for STEM-EBIC Analysis of Advanced Semiconductor Devices

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Semiconductor materials and devices · Integrated Circuits and Semiconductor Failure Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

E.A. Fischione Instruments Inc. , Export, PA , USA

NanoElectronic Imaging Inc. , Los Angeles, CA , USA

References (6)