Multiple Ion Plasma FIB Application for Editing Laser Chips to Enable Live Monitoring of the Semiconductor Material Failure.
Source abstract
Abstract
Lolita Rotkina, Yihan Xiong, Ching-Long Jiang, Stewart McDougall; Multiple Ion Plasma FIB Application for Editing Laser Chips to Enable Live Monitoring of
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis · Advanced Electron Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
TRUMPF Photonics Inc. USA , Cranbury, NJ, United States
References (5)
Show source-provided references
1. Zhang · Sci. Rep · 6 · 1901110.1038/srep19011 ↗
2. Sin · Proc. SPIE · 2021 · 11668
3. Sin · EEE · 2017 · 23 · 1500813
4. Ray · 2016
5. Rotkina