Determining the Polarization Fraction of Thin Film Ferroelectric HZO with STEM EBIC

Abstract

Research context

OpenAlex topics: Ferroelectric and Negative Capacitance Devices · Electronic and Structural Properties of Oxides · Semiconductor materials and devices

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Affiliations

University of California Department of Physics & Astronomy and California NanoSystems Institute, , Los Angeles, CA, USA

University of Virginia Department of Materials Science and Engineering and Department of Electrical and Computer Engineering, , Charlottesville, VA, USA

NanoElectronic Imaging, Inc. , Los Angeles, CA, USA

References (8)