A Novel Strategy to Effectively Characterize FinFET Device by Multidirectional Comprehensive Analytical TEM in Semiconductor Wafer-foundries
Source abstract
Abstract
Wayne Zhao, Bianzhu Fu, Yong Wei, Irene Brooks; A Novel Strategy to Effectively Characterize FinFET Device by Multidirectional Comprehensive Analytical TEM
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advancements in Semiconductor Devices and Circuit Design · Non-Destructive Testing Techniques · Integrated Circuits and Semiconductor Failure Analysis
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References (4)
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1. Zhao · Symp. Proc. the Material Research Society, 2002 Fall Meeting · 2002 · Vol. 738 · G7.15.1
2. Zhao W. , et al. Proc. 38 t International Symposium for Testing and Failure Analysis, (2012), pp. 347~355.
3. 10.1017/S143192761400353510.1017/S1431927614003535 ↗
4. Authors would like to express sincere thanks to Nicolas LaManque, Lowell Hodgkins, and Randy Newkirk, for their excellence in TEM-preparation, Yue Zhang for screening the TEM samples, and GLOBALFOUNDRIES Fab8 electrical failure analysis team for the fault-isolation. Thanks also go to Fab8 Characterization Management and Legal team for supports in the publication clearance, and to Ed Crawford for the proof-reading.