Advances in Elemental Electron Tomography for the State-of-the-art Semiconductor Devices and Circuits Characterization and Failure Analysis
Source abstract
Abstract
B Fu, M Gribelyuk, Frieder H Baumann, C Fang, Wayne Zhao, E Chen, I Brooks; Advances in Elemental Electron Tomography for the State-of-the-art Semiconducto
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis
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References (7)
Show source-provided references
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2. 10.1017/S143192761600225710.1017/S1431927616002257 ↗
3. 10.1017/S143192761600248810.1017/S1431927616002488 ↗
4. 10.1016/S0304-3991(03)00105-010.1016/S0304-3991(03)00105-0 ↗
5. Williams · 9
6. 10.1016/j.ultramic.2011.09.00110.1016/j.ultramic.2011.09.001 ↗
7. The authors acknowledge R. Newkirk, B. Popielarski, and N. LaManque for preparing the TEM samples.